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首页> 外文期刊>Surface & Coatings Technology >Mechanisms of self-lubrication in patterned TiN coatings containing solid lubricant microreservoirs
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Mechanisms of self-lubrication in patterned TiN coatings containing solid lubricant microreservoirs

机译:含固态润滑剂微储层的图案化TiN涂层的自润滑机理

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The tribological mechanisms of friction and lubrication have been investigated in TIN coatings patterned to contain microscopic reservoirs for solid lubricant entrapment. Photo-lithography was used to fabricate three sets of samples on silicon wafers, varying the reservoir size (4 and 9 mu m) and spacing (11 and 25 mu m), which resulted in samples with a nominal reservoir area of either 2 or 10%. Pin-on-disk tests were run using lubricants of graphite and indium and counterfaces of alumina and steel (440C). In most cases, the samples with the 9 mu m holes spaced 25 mu m apart gave the lowest friction coefficients and longest wear life. Analysis of the wear tracks by SEM/EDS methods showed carbon to be present in the holes of the graphite/steel counterface samples, but TiO2 was found in the holes of the graphite/alumina counterface samples. For the indium/steel counterface samples indium was detected within the microreservoirs, but iron was also found, transferred from the ball. These experiments highlight a variety of tribological mechanisms that can operate in microreservoir-patterned coatings. (C) 2010 Elsevier B.V. All rights reserved.
机译:已经在TIN涂层中研究了摩擦和润滑的摩擦学机理,该TIN涂层经图案化以包含用于固体润滑剂截留的微观储层。使用光刻技术在硅晶片上制作三组样品,改变储液器尺寸(4和9μm)和间距(11和25μm),从而得到标称储液器面积为2或10的样品%。使用石墨和铟的润滑剂以及氧化铝和钢的对立面(440C)进行销钉在磁盘上的测试。在大多数情况下,具有9微米孔距25微米的样品具有最低的摩擦系数和最长的磨损寿命。通过SEM / EDS方法分析的磨损痕迹表明,碳存在于石墨/钢对接样品的孔中,而二氧化钛则存在于石墨/氧化铝对接样品的孔中。对于铟/钢对面样品,在微储器中检测到铟,但也发现了从球中转移出的铁。这些实验突出了可以在微储层图案化涂层中起作用的多种摩擦学机理。 (C)2010 Elsevier B.V.保留所有权利。

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