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首页> 外文期刊>Surface & Coatings Technology >Residual stress in cemented carbide following a coating process and after an ion implantation post-treatment of the coating
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Residual stress in cemented carbide following a coating process and after an ion implantation post-treatment of the coating

机译:涂层工艺之后以及涂层的离子注入后处理后硬质合金中的残余应力

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摘要

The residual stress in cemented carbide, specifically in the WC phase, following PVD and CVD coating processes is studied together with the effects of ion implantation post-treatment of the CVD-coated material. Over the depth range studied, thecompressive stress in the WC is unaffected by the PVD coating process, but is changed to tensile after a CVD TiN coating process. In contrast, a dual alumina/Ti(C,N) CVD coating treatment produces a higher compressive stress in the WC. An ion implantation post-treatment has a beneficial effect on the tensile stress under CVD TIN by reducing it to near-zero or to a compressive stress where the magnitude of the effect depends on ion implanted, coating thickness, and acceleration energy. The post-implantation has no effect on the compressive stress in the alumina coating or its Ti(C,N) interlayer.
机译:研究了PVD和CVD涂层工艺后硬质合金(特别是WC相)中的残余应力,以及对CVD涂层材料进行离子注入后处理的影响。在研究的深度范围内,WC中的压应力不受PVD涂层工艺的影响,但在CVD TiN涂层工艺后变为拉伸应力。相反,双重氧化铝/ Ti(C,N)CVD涂层处理在WC中产生较高的压缩应力。离子注入后处理可通过将其减小到接近零或压缩应力的方式对CVD TIN下的拉伸应力产生有益的作用,其中应力的大小取决于离子注入,涂层厚度和加速能量。植入后对氧化铝涂层或其Ti(C,N)中间层的压缩应力没有影响。

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