Development and Test of Micro-vibration Loading Techniques for an Optical Measuring System for Sensor Reliability Analyses

摘要

Two demonstrators of micro-vibration loading techniques have been developed for an optical measuring system to analyse and ensure the long-term reliability of microsystems. The acoustic module is based on a special high frequency loudspeaker. The impact-sound module excites the sensors through a piezo-actuator. A laser-scanning vibrometer characterizes the vibrational sensor properties. The eigenfrequencies, the amplitudes, and mode shapes permit the evaluation of structural behaviour and of structure reliability.