GRAFTING POLYVINYLIMIDAZOLE ONTO SILICON WAFERS VIA A COPOLYMER OF METHACRYLATE EPOXY AND METHACRYLATE-FUNCTIONAL SILANE COUPLING AGENTS

摘要

Copolymerization of glycidylmethacrylate (GMA) with gamma-methacryloxypropyl trimethoxy silane (gamma-MPS) was investigated with the aim of synthesizing a copolymer that could act as an adhesion promoter for poly-vinylimidazole (PVI) onto silicon wafers. The copolymer and PVI graftings were investigated by heat curing. The PVI grafting was also examined by use of ultraviolet cured systems involving photosensitizers. The solution of the GMA-gamma-MPS copolymer was found to be an effective primer for promoting the adhesion of PVI onto silicon wafers. (C) 1997 Elsevier Science Ltd. [References: 12]