Characteristics of ring type traveling wave ultrasonic motor in vacuum

摘要

The characteristics of ultrasonic motor strongly depend on the properties of stator/rotor contact interface which are affected by ambient environment. With the developed apparatus, load properties of two ring type traveling wave ultrasonic motors in atmosphere, low vacuum and high vacuum were studied, respectively. Wear of friction material, variations of vacuum degree and the temperature of motor during the experiment were also measured. The results show that load properties of motor A in vacuum were poorer than those in atmosphere, when load torque M-f was less than 0.55 N m. Compared to motor A, load properties of motor B were affected a little by environmental pressure. Wear of friction material in vacuum was more severe than wear in atmosphere. The temperature of motor in vacuum rose more quickly than it in atmosphere and had not reached equilibrium in 2 h experiment. However, the temperature of motor in atmosphere had reached equilibrium in about forth minutes. Furthermore, outgas was also observed during experiment under vacuum conditions.