High-pulse-repetition-rate UV lasers with the inductance _ capacitance discharge stabilisation

摘要

Compact high-pulse-repetition-rate XeF and KrF excimer lasers and an N_2 laser with plate electrodes and the inductance _ capacitance discharge stabilisation are studied. The composition and pressure of the active medium of lasers are optimised for obtaining the maximum output energy and maximum pulse repetition rate at comparatively low (no more than 19 m s ~(-1)) active-medium flow rates in the interelectrode gap. The pulse repetition rate achieved 4-5 kHz for the relative root-mean-square deviation of the laser pulse energy less than 2 %. It is found that the energy of the N_2-laser pulses changes periodically under the action of acoustic perturbations appearing at high pulse repetition rates. It is shown that the use of the inductance _capacitance stabilisa_tion of the discharge provides the increase in the maximum pulse repetition rate by 0.5-1.5 kHz (depending on the active medium type). It is found that the stability of the output energy and maximum pulse repetition rate depend on the location of preionisation sparks with respect to the gas flow direction. Some ways for the development of the technology of plate electrodes and inductance _ capacitance discharge stabilisation are proposed.