Fabrication and finite element analysis of vibrating parallel film actuator made with cellulose acetate for potential haptic application

摘要

The present study investigates a film actuator made with dielectric cellulose acetate films separated by narrow spacers as a means of electrostatic actuation for potential haptic application. Fabrication process for the actuator is explained along with experiments conducted over a wide frequency range of actuation frequency. A valid finite element simulation of the actuator is made on the quarter section of the actuator by using full 3D finite elements. Vibration characteristics such as fundamental natural frequency, mode shape and output velocity in the frequency range for haptic feeling generation are obtained from the finite element analysis and compared with the experimental results. Experimental results demonstrate that the finite element model is practical and effective enough in predicting the vibration characteristics of the actuator for haptic application. The film actuator shows many promising properties like high transparency, wide range of actuation frequency and high vibration velocity for instance.