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首页> 外文期刊>Plasma Sources Science & Technology >A directly coupled monolithic rectangular resonator forming a robust microwave plasma ion source for SIFT-MS
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A directly coupled monolithic rectangular resonator forming a robust microwave plasma ion source for SIFT-MS

机译:直接耦合的整体矩形谐振器,形成用于SIFT-MS的坚固的微波等离子体离子源

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摘要

A simple ion source is described that consists of a glass discharge tube positioned judiciously in a rectangular waveguide resonator that is directly coupled to an under-run standard magnetron. This ion source operates well with gas mixtures, including rare gases, air and water vapour in the pressure range 10-100 Pa and at magnetron powers within the range 15-40 W. The main advantage of this magnetron/cavity arrangement is the absence of mechanically adjustable parts (aerial and tuning stub), in contrast to other commonly used arrangements that combine a cavity resonator that is connected to the magnetron via a launcher and a coaxial cable.
机译:描述了一种简单的离子源,该离子源包括一个玻璃放电管,该玻璃放电管明智地位于矩形波导谐振器中,该矩形波导谐振器直接耦合至欠载标准磁控管。此离子源可与混合气体(包括稀有气体,空气和水蒸气)在10-100 Pa的压力范围内以及在磁控管功率在15-40 W的范围内一起良好运行。这种磁控管/腔体布置的主要优点是不需要与其他常用的将通过谐振腔通过发射器和同轴电缆连接到磁控管的腔谐振器相结合的常用布置相反,机械可调节部件(航空和调谐短截线)。

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