Implicit and electrostatic particle-in-cell/Monte Carlo model in two-dimensional and axisymmetric geometry: II. Self-bias voltage effects in capacitively coupled plasmas

摘要

With an implicit particle-in-cell/Monte Carlo model, capacitively coupled plasmas are studied in two-dimensional and axisymmetric geometry. Self-bias dc voltage effects are self-consistently considered. Due to finite length effects, the self-bias dc voltages show complex relations to the electrode areas. Two-dimensional kinetic effects are also illuminated. Compared with the fluid model, PIC/MC model is numerical-diffusion-free and more detailed properties of the plasmas can be shown.