Thin ferroelectric films: Preparation and prospects of integration

摘要

The properties of (Ba,Sr)TiO_3 and BiFeO_3 thin films and related nanostructures have been considered. The films have been prepared by rf sputtering in an oxygen atmosphere at an elevated pressure, and the nanostructures have been produced using focused ion-beam etching. The electric field has been applied across a planar interdigital structure of electrodes. The structure, dielectric, electro-optical, and nonlinear optical properties of the prepared samples have been investigated over wide ranges of thicknesses and electric field frequencies. The high efficiency of the planar switching and its influence on the optical properties of the produced structures have been demonstrated. The nanostructuring makes it possible to change the dielectric and optical properties of the materials under investigation, thus increasing the range of switching of functional parameters.