Numerical simulation of atmospheric-pressure helium discharge driven by combined radio frequency and trapezoidal pulse sources

摘要

Atmospheric-pressure capacitive discharges driven by combined radio frequency (rf) and trapezoidal pulse sources are investigated using a one-dimensional self-consistent fluid model. The results show that the plasma intensity in the rf discharge can be enhanced drastically when a low duty ratio short pulse source is additionally applied. The mechanism for the increase in the plasma density can be attributed to a strong localized electric field induced by the applied short pulse; the strong electric field generates a great number of high energy electrons and chemically active particles, which subsequently generate more electrons and ions. The rf capacitive discharges with the aid of externally applied short pulses can achieve a high plasma density with better power efficiency.