Petri-net based scheduling strategy for semiconductor manufacturing processes

摘要

Semiconductor manufacturing is a highly automated and capital-intensive industrial process. The operating cost of a wafer processing plant is in general closely related to the design and management of its process flows. Traditionally, the task of production scheduling is performed manually on the basis of past experiences. There are thus real incentives to develop a systematic approach to construct a mathematical programming model in order to reduce the chance of human errors and to ensure operational efficiency in implementing the resulting schedules. To this end, the Petri nets are adopted in this work to accurately model the semiconductor manufacturing activities. The token movements in a Petri net are represented with the well-established scheduling model for batch chemical processes, and the optimal schedule of the given semiconductor process can then be determined accordingly. The feasibility and effectiveness of this scheduling strategy is demonstrated in the present paper with three examples, i.e., the final test process, the re-entrant flow process, and the photolithography-etching process.