Data Acquisition and Reduction Algorithm for Shearing Interferometer Based Long Trace Profilometer

摘要

The Long Trace Profilometer (LTP) is a noncontact optical profiling instrument, designed to measure the absolute surface figure to nanometer accuracy of long strip flat, spherical and aspherical Xray optics of up to 1200mm in length of distance. A key feature of the LTP is the wide range of surface shapes that it can measure. The ease of alignment and great flexibility are a result of the unique LTP optical system. The direct slope measuring capability of the LTP has proven to be very valuable in the measurement of synchrotron beam line optics and other xray mirrors[2]. A new polarization Shearing Interferometer based Long Trace Profilometer has been developed and built at Indian Institute of Astrophysics, Bangalore. This paper gives details of the data reduction software for profile calculation at sub pixel level accuracy.