Emission spectra of microwave plasma and MPCVD transparent diamond film

摘要

The emission spectra of microwave plasma was in-line measured in visible light wave-band using a self-made optical fiber spectrometer, the change rule of the atomic hydrogen (H) and double-carbon radical (C_2) was given under different CH_4/H_2 ratios of volume flow. The effect of atomic hydrogen (H) on CVD diamond, deposited high quality and transparent diamond film by microwave plasma CVD (MPCVD) was analyzed according to the measured results by scan- nin electron microscopy (SEM), laser Raman spectrometry (Raman), and Fourier transform infrared spectrometry (FTIR).