Combinatorial analysis of plasma-polymer interactions for formation of inorganic-soft materials hybrid structure

摘要

Combinatorial analysis of plasma-polymer interactions with combinatorial plasma-process analyzer has been carried out in terms of etching characteristics and chemical bonding state of polymers. Surface roughness of the polymer slightly increased with increasing ion dose, while the average peak interval considerably decreased with ion dose. The XPS results showed almost linear dependence with increasing ion dose. The data points obtained from three independent batches of experiments with 5 samples showed universal relations, indicating efficiency of the combinatorial method for effective basic data acquisition.