複合構造制御型光硬化性樹脂切断ブレードの開発

摘要

工作物を高能率で切断するため，スロット付きセグメントタイプのダイヤモンドカッタが広く用いられている．スロットの存在が切り屑の逃げ場を提供し，自生発刃作用を活性化させ，加工液の加工点への浸透を高めるなどの理由で，切断抵抗や切断温度の低下に効果があることがよく知られている．また，切断抵抗の抑制は工具の寿命を長くしている．%A diamond blade is widely used as a cutting tool for slicing materials such as stones, ceramics and glasses in a straight line. Generally, it has many slots and their functions have the effect of reducing cutting resistance and increasing the tool life. Against this background, the application of photocurable resins to the blade with slots has been examined on both single-layered blade and multi-layered blade. In this paper, a combined-structure blade was proposed and experiments were performed to investigate cutting characteristics during dicing. As the results of a series of cutting tests on silicon wafers utilizing the combined-structure blade, the remarkable improvement of cutting performance was verified.