小型精密機器のための組込み型多軸アクティブ制振・除振装置の開発

摘要

Recently, high-resolution measurement instruments such as probe microscopes have been used widely, since their price is getting lower, and their size is becoming smaller. Therefore, these measurement instruments have been used in various environments. However, to use these instruments effectively, it is important to isolate the environmental vibration transmitted to the instruments. For this reason, we are developing new built-in type multi-axis vibration isolation devices equipped with inertia force generators (IFG). In designing this vibration isolation device, modal analysis and "direct inertia force control (D1FC)" are used. DIFC is the newly developed design method for the vibration control systems proposed by authors. Combination of modal analysis and DIFC can make the complex control system design process simple and clear. In this paper, we show how the controller is designed, and also discuss the effectiveness of the method by experiment.%近年，プローブ顕微鏡や電子顕微鏡などの超高分解rn能測定機器の低価格化，小型化や操作性の向ヒが進んrnでいる．また，半導体をはじめとする微細加工分野のrn発展も著しい．