A STUDY OF MICRO-MECHANICAL SENSORS USING AN ORGANIC THIN-FILM TRANSISTOR (OFTF)

摘要

We studied a novel acceleration sensor based on an organic thin-film transistor (OTFT) using pentacene (C_(22)H_(14)) as a semiconductor material and a solution-processed polyimide gate dielectric. We aim that OTFTs are sensitive to applied force. Simulation results suggest that applied force and bending characteristics are affected. Next, we fabricated a pentacene OTFT with polyimide gate dielectric layers on silicon substrate, and measured its electrical properties. As a result, we succeeded in measuring that a current of the OTFT is changed by applying gate voltage and source-drain voltage. And our measurements also reveal a current dependence of the transfer characteristics where the drain current of the OTFT is changed by applying mechanical acceleration.