Nonlinear response of a resonant viscoelastic microbeam under an electrical actuation

摘要

In this paper, using perturbation and Galerkin method, the response of a resonant viscoelastic microbeam to an electric actuation is obtained. The microbeam is under axial load and electrical load. It is assumed that midplane is stretched, when the beam is deflected. The equation of motion is derived using the Newton's second law. The viscoelastic model is taken to be the Kelvin-Voigt model. In the first section, the static deflection is obtained using the Galerkin method. Exact linear symmetric mode shape of a straight beam and its deflection function under constant transverse load are used as admissible functions. So, an analytical expression that describes the static deflection at all points is obtained. Comparing the result with previous research show that using deflection function as admissible function decreases the computation errors and previous calculations volume. In the second section, the response of a microbeam resonator system under primary and secondary resonance excitation has been obtained by analytical multiple scale perturbation method combined with the Galerkin method. It is shown, that a small amount of viscoelastic damping has an important effect and causes to decrease the maximum amplitude of response, and to shift the resonance frequency. Also, it shown, that an increase of the DC voltage, ratio of the air gap to the microbeam thickness, tensile axial load, would increase the effect of viscoelastic damping, and an increase of the compressive axial load would decrease the effect of viscoelastic damping.