A study on AGV-induced floor micro-vibration in TFT-LCD high-technology fabs (pages 451–471)

摘要

This study explores vertical floor micro-vibration induced by the automated guided vehicles (AGVs) innthin-film-transistor liquid-crystal-display (TFT-LCD) fabs. The state-space procedure is adopted toncompute the AGV-induced floor vibration as it preserves the desired numerical stability and accuracy innhigh-frequency responses. The dynamic analysis of an AGV moving on an equivalent three-span beamnmodel of a TFT-LCD building is simulated by taking into account various AGV speeds and engine forces.nNumerical simulations demonstrate that if proper engine forces and excitation frequency contents of thenAGV moving loads are used, the peak AGV-induced floor micro-vibration level can be predicted by thenproposed method. Moreover, the effectiveness of vibration control by span-reduction as well as energydissipationnby viscoelastic dampers is also examined. In comparison with span-reduction, application ofnenergy-dissipation devices is more effective in vibration suppression as they enhance the dampingncharacteristics of the multi-span floor system whose natural frequencies are potentially in resonance withnthe excitation frequencies of the AGV moving loads ranging in a broad bandwidth. Copyright r 2011nJohn Wiley & Sons, Ltd.