DETERMINATION OF OPTICAL, ELASTIC, AND ACOUSTICAL PROPERTIES OF POROUS SILICON AS A FUNCTION OF ANODIZATION CURRENT DENSITY

摘要

Researchers have shown great interest in porous silicon due to the fact that it can be fabricated with specific material characteristics. The electrical, optical, chemical, and mechanical characteristics of the material can all be modified by changing parameters of the fabrication process. The porous silicon was prepared by electrochemical etching of p-type silicon wafer where the etchant consists of a mixture of hydrofluoric acid and ethanol with various anodization current densities and 10 min etching time. The bulk modulus, Young's modulus, propagation velocities of longitudinal and transverse waves, and elastic constants are investigated. The presently investigated numerical data are found to have, in general, good agreement with the available experiment data and other such theoretical values.