Mach-Zehnder Interferometer-Based Evanescent Refractometer Inscribed at the Surface of Eagle2000 by Femtosecond Laser Writing

摘要

The potential of evanescent Mach-Zehnder interferometers, embedded in Eagle2000 substrates, as refractive index sensors was assessed. For that, femtosecond laser direct writing and wet etching were used to fabricate and expose the sensing arm at the surface of the glass substrate, while keeping the reference arm buried. From the analysis of the structures’ spectral response, we found that the wavelength shift of the different order peaks increased greatly for refractive indices nearing that of the glass, indicating a greater overlap between the guided mode’s evanescent field and the external medium. Therefore, a maximum sensitivity of 10271 nm/RIU was obtained at a refractive index of 1.491. The sensitivity in the refractive index range of water-based solutions was, on the other hand, limited to 446 ± 39 nm/RIU. Due to the geometry of the device, applications with films deposited at the surface of the substrate and PDMS based microfluidic channels can be explored.