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首页> 外文期刊>IEEE sensors journal >Design and Performance Analysis of Tunnel Field Effect Transistor With Buried Strained Si1−xGex Source Structure Based Biosensor for Sensitivity Enhancement
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Design and Performance Analysis of Tunnel Field Effect Transistor With Buried Strained Si1−xGex Source Structure Based Biosensor for Sensitivity Enhancement

机译:隧道场效应晶体管的设计与性能分析,具有基于掩埋的Si1-XGex源结构的敏感性增强

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摘要

In this paper, a dielectrically modulated symmetrical double gate, having dual gate material, Tunnel Field-Effect transistor with Buried strained Si(1-x)Gex source structure, has been investigated as a biosensor. This structure is proposed for the very first time to electrically detect the biological molecules at very low power consumption. In the proposed biosensor structure, the top thin Si channel of TFET is overlapped with the Si1-xGex source. This increases the tunneling area, due to which ON current of the biosensor also increases. To detect the biomolecules a nanogap cavity has been created over 1nm gate oxide. Also to decrease the short channel effects, dual-gate material with different metal work functions is used on both the symmetrical double gates. By varying the small bandgap material (Ge) mole fraction in the SiGe and after inserting different biological molecules (of the different dielectric) in a cavity, the variation in transfer characteristic, I-ON/I-OFF current ratio, SS along with their sensitivity is studied. Also, to signify the presence of biomolecules in the cavity, the g(m)/I-d ratio as a sensing metric is studied under the sub-threshold region. Along with the fully filled biomolecules cavity, the partially filled cavity and the effect of a steric hindrance have also investigated in this paper with various non-uniformstep patterns of biomolecules in the cavity. Because, in a more practical situation, the steric hindrance effect doesn't allow the cavity to be entirely filled. Also, this paper addresses the optimization of drain current sensitivity, by different cavity length with different source overlapping cavity.
机译:本文研究了具有双栅极材料,具有掩埋应变Si(1-X)GEX源结构的双栅极材料,具有掩埋应力Si(1-X)Gex源结构的电介质调制的对称双栅极。本结构是第一次在非常低的功耗下电检测生物分子的结构。在所提出的生物传感器结构中,TFET的顶部薄Si通道与Si1-Xgex源重叠。这增加了隧道区域,因为它们的生物传感器的电流也增加了。为了检测生物分子,在1nm栅极氧化物上产生了纳米孔腔。还要降低短频道效果,在对称双门上使用具有不同金属工作功能的双栅极材料。通过在SiGe中改变小带隙材料(GE)摩尔分数和在腔中插入不同的生物分子(不同电介质)之后,转移特性的变化,I-ON / I-OFF比率SS以及其研究了敏感性。而且,为了表示腔中的生物分子存在,在子阈值区域下研究了作为感测度量的G(M)/ I-D比。随着完全填充的生物分子腔,在本文中也研究了部分填充的腔体和空间障碍的效果,并且在腔中具有各种非均匀的生物分子图案。因为,在更实际的情况下,空间阻碍效果不允许完全填充腔。此外,本文通过不同源重叠腔的不同腔长,解决了漏极电流灵敏度的优化。

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