Design and Characterization of a Micro-Fabricated Graphene-Based MEMS Microphone

Graham S. Wood; Alberto Torin; Asaad K. Al-mashaal; Leslie S. Smith; Enrico Mastropaolo; Michael J. Newton; Rebecca Cheung

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Design and Characterization of a Micro-Fabricated Graphene-Based MEMS Microphone

机译：基于微型石墨烯的MEMS麦克风的设计与表征

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We fabricate a microelectromechanical systems (MEMS) microphone that incorporates a graphene-based membrane that vibrates in response to acoustic forcing. We employ a novel fabrication process, where a graphene/poly(methyl methacrylate) (PMMA) bilayer mem

机译：我们制造了一种微机电系统（MEMS）麦克风，该麦克风结合了基于石墨烯的膜，该膜响应于声强迫而振动。我们采用一种新颖的制造工艺，其中石墨烯/聚（甲基丙烯酸甲酯）（PMMA）双层膜

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来源
《IEEE sensors journal》 |2019年第17期|7234-7242|共9页
作者
Graham S. Wood; Alberto Torin; Asaad K. Al-mashaal; Leslie S. Smith; Enrico Mastropaolo; Michael J. Newton; Rebecca Cheung;
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作者单位

School of Engineering Institute for Integrated Micro and Nano Systems The University of Edinburgh Edinburgh U.K.;

Acoustics and Audio Group The University of Edinburgh Edinburgh U.K.;

School of Engineering Institute for Integrated Micro and Nano Sys;

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原文格式 PDF
正文语种 eng
中图分类
关键词
Graphene; Microphones; Electrodes; Sensors; Fabrication; Micromechanical devices; Sensitivity;

机译：石墨烯麦克风;电极;传感器;制造;微机械设备;灵敏度;

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1. Design and characterization of high sensitive MEMS capacitive microphone with fungous coupled diaphragm structure [J] . Gharaei Hassan, Koohsorkhi Javad Microsystem technologies . 2016,第2期

机译：带有真菌耦合膜片结构的高灵敏度MEMS电容麦克风的设计与表征
2. A MEMS Capacitive Accelerometer Design as Middle Ear Microphone Based on Ossicular Chain Micromechanic Characterization at Umbo for Fully Implantable Cochlear Prosthesis [J] . Mark A. Zurcher, Maroun Semaan, Cliff A. Megerian, Sensors and materials . 2010,第6期

机译：基于Usbo听骨链微机械特性的中耳麦克风MEMS电容式加速度计设计，用于完全植入式人工耳蜗
3. Design of MEMS microphone protective membranes for continuous outdoor applications [J] . Wenzel T., Rettig R. Applied Acoustics . 2021,第Deca期

机译：用于连续户外应用的MEMS麦克风保护膜设计
4. Design, Fabrication and Characterization of a Biologically Inspired MEMS Directional Microphone [C] . Veda Sandeep Nagaraja, K.J Rudresha, S.L. Pinjare IEEE SENSORS Conference . 2018

机译：受生物启发的MEMS定向麦克风的设计，制造和表征
5. Design, fabrication, and characterization of a MEMS dual-backplate capacitive microphone. [D] . Martin, David Thomas. 2007

机译：MEMS双背板电容式麦克风的设计，制造和表征。
6. Design and Modeling of a MEMS Dual-Backplate Capacitive Microphone with Spring-Supported Diaphragm for Mobile Device Applications [O] . Néstor N. Peña-García, Luz A. Aguilera-Cortés, Max A. González-Palacios, 2018

机译：带有弹簧支撑膜片的MEMS双背板电容麦克风的设计与建模用于移动设备应用
7. Design and Characterization of a 2D Array of MEMS Microphones for Acoustical Imaging [O] . Izquierdo Fuente Alberto, Villacorta Calvo Juan José, del Val Puente Lara, 2016

机译：用于声学成像的MEMS麦克风二维阵列的设计和表征
8. Design and Characterization of MEMS Optical Microphone for Aeroacoustic Measurement [R] . Kadirvel, K. , Taylor, R. , Horowitz, S. , 2004

机译：用于气动声学测量的mEms光学麦克风的设计与表征

Design and Characterization of a Micro-Fabricated Graphene-Based MEMS Microphone

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