Micro Gas Sensor Array With Neural Network for Recognizing Combustible Leakage Gases

摘要

A micro gas sensor array, consisting of four porous tin oxide thin films added with noble metal catalysts on a micro-hotplate, was designed and fabricated. The micro-hotplate was designed to obtain a uniform thermal distribution along with a low-power consumption and fast thermal response. The sensing properties of the sensors toward certain combustible gases, i.e., propane, butane, LPG, and carbon monoxide, were evaluated. A multilayer neural network was then used to classify the gas species. The results demonstrated that the proposed micro sensor array, plus multilayer neural network employing a backpropagation learning algorithm, was very effective in recognizing specific kinds and concentration levels of combustible gas below their respective threshold limit values.