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Characterization of zinc oxide coated optical fiber long period gratings with improved refractive index sensing properties

机译:具有改善的折射率传感特性的氧化锌涂层光纤长周期光栅的表征

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摘要

A fiber-optic refractive index (RI) sensor based on a long period fiber grating (LPFG) coated with a zinc oxide (ZnO) thin film was fabricated and characterized. A method to overcoat the LPFG's with a homogeneous ZnO thin films was developed. Characterization of ZnO thin films, deposited simultaneously on silicon (Si) planar substrates, was performed using Scanning Electron Microscope, Energy Dispersive X-ray Spectroscopy and X-ray Photo-electron Spectroscopy. The LPFGs with ZnO coatings from 29 to 145 nm of thickness were characterized and compared in terms of the wavelength shift and the intensity of the attenuation bands changing the surrounding refractive index (SRI) from 1.300 to 1.600. An average wavelength sensitivity of ~7162 nm/RIU was achieved in the RI range from 1.440 to 1.456 and more than 12,000 nm/RIU at 1.440 RI. Using a ZnO film thickness of 116 nm and in the RI region between 1.320 and 1.360 the average sensitivity of ~806 nm/RIU was measured for a 145 nm thick film. Working as an intensity sensing device, the 87 nm coated LPFG shows a linear sensitivity of 216.4dB/RIU in a wide range of RI from 1.340 to 1.420.
机译:制造并表征了基于涂覆有氧化锌(ZnO)薄膜的长周期光纤光栅(LPFG)的光纤折射率(RI)传感器。开发了一种用均匀的ZnO薄膜覆盖LPFG的方法。使用扫描电子显微镜,能量色散X射线光谱法和X射线光电子光谱法对同时沉积在硅(Si)平面基板上的ZnO薄膜进行表征。对厚度为29至145 nm的ZnO涂层的LPFG进行了表征,并根据波长偏移和将周围折射率(SRI)从1.300更改为1.600的衰减带强度进行了比较。在1.440至1.456的RI范围内,平均波长灵敏度达到〜7162 nm / RIU,而在1.440 RI时,平均波长灵敏度达到12,000 nm / RIU以上。使用116 nm的ZnO膜厚度,在RI区1.320和1.360之间,对于145 nm厚的膜,测得的平均灵敏度约为806 nm / RIU。作为强度感测设备,在1.340至1.420的RI范围内,涂有87 nm涂层的LPFG的线性灵敏度为216.4dB / RIU。

著录项

  • 来源
    《Sensors and Actuators》 |2016年第2期|45-51|共7页
  • 作者单位

    CAP/INESC TEC - Technology and Science and FCUP, Faculty of Sciences, University of Porto, Portugal;

    INL - International Iberian Nanotechnology Laboratory, Avenida Mestre Jose Veiga, 4715-330 Braga, Portugal;

    CAP/INESC TEC - Technology and Science and FCUP, Faculty of Sciences, University of Porto, Portugal;

    CAP/INESC TEC - Technology and Science and FCUP, Faculty of Sciences, University of Porto, Portugal,Department of Physics, School of Sciences and Technology, Universidade de Tras-os-Montes e Alto Douro, Apartado 1013, 5001-801 Vila Real, Portugal;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Long period fiber gratings; Fiber sensors; Zinc oxide coated LPFG; Refractive index; Fiber optic refractometer;

    机译:长周期光纤光栅;光纤传感器;氧化锌涂层LPFG;折射率光纤折光仪;

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