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首页> 外文期刊>Sensors and Actuators >ZnO branched p-Cu_xO @n-ZnO heterojunction nanowires for improving acetone gas sensing performance
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ZnO branched p-Cu_xO @n-ZnO heterojunction nanowires for improving acetone gas sensing performance

机译:ZnO分支P-CU_XO @ N-ZnO异质结纳米线,用于改善丙酮气体传感性能

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摘要

A simple and effective preparation method was proposed to improve acetone gas sensing performance based on ZnO branched p-Cu_xO@n-ZnO nanowires (NWs) by hydrothermal processing and atomic layer deposition technique. The gas sensor was fabricated on micro-electromechanical systems with lower power consumption and better integrated circuit compatibility. Compared with bare Cu_xO NWs and p-Cu_xO@n-ZnO core-shell NWs, the designed ZnO branched p-Cu_xO@n-ZnO NWs have higher gas response and better selectivity to acetone. The response value of the branched p-Cu_xO@n-ZnO NWs based sensor to 50 ppm acetone at the optimal temperature of 250 °C is approximately 6.4, which is 5 and 3.5 times of the devices with pristine Cu_xO and p-Cu_xO@n-ZnO core-shell NWs, respectively. The sensitivity enhancement mechanism of branched NWs is explained based on the depletion principle and the increased specific surface area. It is expected that the proposed ZnO branched p-Cu-xO@n-ZnO NWs has a good reference for the development of high sensitivity and selectivity gas sensors.
机译:提出了一种简单且有效的制备方法,以通过水热处理和原子层沉积技术改善基于ZnO支链P-CU_XO @ N-ZnO纳米线(NWS)的丙酮气体传感性能。气体传感器在具有较低功耗和更好的集成电路兼容性的微机电系统上制造。与裸CU_XO NWS和P-CU_XO @ N-ZnO核心壳NW相比,设计的ZnO分支P-CU_XO @ N-ZnO NWS具有更高的气体响应和更好的丙酮选择性。基于250℃的最佳温度的基于分支的P-CU_XO @ N-ZnO NWS的响应值为50ppm丙酮为约6.4,是具有原始CU_XO和P-CU_XO @ N的装置的5和3.5倍-ZNO核心壳NWS。基于耗尽原理和增加的比表面积来解释支链NWS的灵敏度增强机构。预计所提出的ZnO支链P-Cu-XO @ N-ZnO NWS对高灵敏度和选择性气体传感器的开发具有很好的参考。

著录项

  • 来源
    《Sensors and Actuators 》 |2020年第12期| 128729.1-128729.12| 共12页
  • 作者单位

    State Key Laboratory of ASIC and System Shanghai Institute of Intelligent Electronics & Systems School of Microelectronics Fudan University Shanghai 200433 China;

    State Key Laboratory of ASIC and System Shanghai Institute of Intelligent Electronics & Systems School of Microelectronics Fudan University Shanghai 200433 China;

    State Key Laboratory of ASIC and System Shanghai Institute of Intelligent Electronics & Systems School of Microelectronics Fudan University Shanghai 200433 China;

    State Key Laboratory of ASIC and System Shanghai Institute of Intelligent Electronics & Systems School of Microelectronics Fudan University Shanghai 200433 China;

    State Key Laboratory of ASIC and System Shanghai Institute of Intelligent Electronics & Systems School of Microelectronics Fudan University Shanghai 200433 China;

    State Key Laboratory of ASIC and System Shanghai Institute of Intelligent Electronics & Systems School of Microelectronics Fudan University Shanghai 200433 China;

    State Key Laboratory of ASIC and System Shanghai Institute of Intelligent Electronics & Systems School of Microelectronics Fudan University Shanghai 200433 China;

    State Key Laboratory of ASIC and System Shanghai Institute of Intelligent Electronics & Systems School of Microelectronics Fudan University Shanghai 200433 China;

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  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    Branched nanowire; Cu_xO-ZnO; Atomic layer deposition; Acetone; Gas sensor;

    机译:分枝纳米线;CU_XO-ZNO;原子层沉积;丙酮;气体传感器;

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