Optimization of a resonant cavity enhanced MSM photodetector

摘要

This paper presents a 2D model and numerical simulation of a suhmicron resonant cavity enhanced metal-semiconductor-metal photodetector (RCE MSM-PD). Nonstationary effects caused by electron intervalley transfer are taken into account in calculating the RCE MSM--PD response. The analysis of the quantum efficiency and the 3 dB bandwidth shows that there is an optimum channel thickness, for which a maximum bandwidth-quantum efficiency product can be reached.