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The effect of the geometry aspect ratio on the silicon ellipse-shaped surrounding-gate field-effect transistor and circuit

机译:几何长宽比对硅椭圆形围栅场效应晶体管和电路的影响

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摘要

The silicon (Si) surrounding-gate metal-oxide-semiconductor field-effect transistor (MOSFET) has ultimate gate structures and is a potential candidate for use in next-generation high-performance nano-devices. However, because of limitations of the fabrication process, theoretically ideally round shape of the surrounding gate may not always guarantee. These limitations may lead to the formation of an ellipse-shaped surrounding gate with major (a) and minor (b) axes of different lengths. In this study, the effect of the geometry aspect ratio, a/b, on the dc and ac characteristics of the 16 nm gate ellipse-shaped surrounding-gate MOSFETs and circuits is examined by using a three-dimensional coupled device-circuit simulation technique. The dependences of electrical characteristics on the geometry aspect ratio are evaluated with reference to various device characteristics and the circuit properties, including the circuit gain, the 3 dB bandwidth, the unity-gain bandwidth, the rise/fall time and the delay time. In analog circuits, the device with an aspect ratio of less than 1 is promising because the short-channel effect is suppressed. However, for a digital circuit configuration, the transient response of the circuit relies on the charge/discharge capability of the transistor. Thus, a device with a large aspect ratio, such as 2, will be more suitable for digital applications.
机译:硅(Si)围栅金属氧化物半导体场效应晶体管(MOSFET)具有最终的栅结构,并且是用于下一代高性能纳米器件的潜在候选物。然而,由于制造工艺的限制,理论上可能无法始终保证理想的环绕门的圆形。这些限制可能导致形成椭圆形的环绕式浇口,其中长轴(a)和短轴(b)的长度不同。在这项研究中,通过使用三维耦合器件电路仿真技术,研究了几何长宽比a / b对16 nm栅极椭圆形环绕栅MOSFET和电路的dc和ac特性的影响。参照各种器件特性和电路特性(包括电路增益,3 dB带宽,单位增益带宽,上升/下降时间和延迟时间)来评估电气特性对几何长宽比的依赖性。在模拟电路中,长宽比小于1的设备很有希望,因为它可以抑制短沟道效应。但是,对于数字电路配置,电路的瞬态响应取决于晶体管的充电/放电能力。因此,具有较大纵横比(例如2)的设备将更适合数字应用。

著录项

  • 来源
    《Semiconductor science and technology》 |2009年第9期|19.1-19.8|共8页
  • 作者

    Yiming Li; Chih-Hong Hwang;

  • 作者单位

    Institute of Communication Engineering, National Chiao-Tung University, Hsinchu 300, Taiwan Department of Electrical Engineering, National Chiao-Tung University, Hsinchu 300, Taiwan National Nano Device Laboratories, Hsinchu 300, Taiwan;

    Institute of Communication Engineering, National Chiao-Tung University, Hsinchu 300, Taiwan;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

  • 入库时间 2022-08-18 01:32:06

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