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Formation of axial metal-semiconductor junctions in GaAs nanowires by thermal annealing

机译:GaAs纳米线中轴向金属-半导体结的热退火形成

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摘要

We demonstrate the formation of nanoscale axial Schottky contacts in GaAs nanowires by thermal annealing of NiGeAu multilayers. Energy dispersive x-ray spectroscopy indicates that in specific annealing conditions a sharply-defined Au-rich phase can be obtained in the vicinity of the metallic contacts. Charge transport characteristics are analyzed for different degrees of diffusion of the Au-rich phase in the wire and indicate that it has a metallic nature. The mechanism behind this local post-growth modification of the nanowire composition and its potential impact on device applications are discussed.
机译:我们演示了通过对NiGeAu多层膜进行热退火,在GaAs纳米线中形成纳米级轴向肖特基接触。能量色散x射线光谱法表明,在特定的退火条件下,可以在金属触点附近获得清晰定义的富金相。分析了导线中富金相的不同扩散程度的电荷传输特性,并表明它具有金属性质。讨论了纳米线成分的这种局部后生长修饰的机制及其对器件应用的潜在影响。

著录项

  • 来源
    《Semiconductor science and technology》 |2014年第5期|054001.1-054001.7|共7页
  • 作者单位

    Istituto Officina dei Materiali - CNR, Basovizza SS 14 km 163.5, I-34149 Trieste, Italy;

    Istituto Officina dei Materiali - CNR, Basovizza SS 14 km 163.5, I-34149 Trieste, Italy;

    Istituto Officina dei Materiali - CNR, Basovizza SS 14 km 163.5, I-34149 Trieste, Italy ,NEST, Scuola Normale Superiore and Istituto Nanoscienze - CNR, Piazza S Silvestro 12, I-56127 Pisa, Italy;

  • 收录信息 美国《科学引文索引》(SCI);美国《工程索引》(EI);美国《生物学医学文摘》(MEDLINE);
  • 原文格式 PDF
  • 正文语种 eng
  • 中图分类
  • 关键词

    nanowires; Schottky contact; thermal annealing; GaAs; diffusion;

    机译:纳米线;肖特基接触;热退火;砷化镓;扩散;

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