Taking a New Approach to Copper ECD Bath Management

Olivier Blachier; Jim Clark

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Taking a New Approach to Copper ECD Bath Management

机译：采用新方法进行铜ECD镀液管理

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Management of copper electroplating baths can now move from passive or semi-active methods to an active "remove-and-reconstitute" method for controlling organic additives and their breakdown products.

机译：铜电镀液的管理现在可以从被动或半主动方法转变为主动的“去除再配制”方法，以控制有机添加剂及其分解产物。

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《Semiconductor International》 |2000年第8期|p.229-230232234|共4页
作者
Olivier Blachier; Jim Clark;
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收录信息美国《工程索引》(EI);
原文格式 PDF
正文语种 eng
中图分类无线电电子学、电信技术;
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入库时间 2022-08-17 23:12:27

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专利

1. A review of acid copper plating bath life extension & copper recovery from acid copper baths [J] . D. Bless Plating & Surface Finishing . 2001,第10期

机译：酸性镀铜浴寿命的延长和从酸性铜镀浴中回收铜的综述
2. Wear resistance of copper EDM tool electrode electroformed from copper sulfate baths and pyrophosphate baths [J] . Ping Mei Ming, Di Zhu, Yong Bin Zeng, The International Journal of Advanced Manufacturing Technology . 2010,第5a8期

机译：硫酸铜浴和焦磷酸盐浴电铸铜电火花加工工具电极的耐磨性
3. Wear resistance of copper EDM tool electrode electroformed from copper sulfate baths and pyrophosphate baths [J] . Ping Mei Ming, Di Zhu, Yong Bin Zeng, The International Journal of Advanced Manufacturing Technology . 2010,第5a8期

机译：硫酸铜浴和焦磷酸盐浴电铸铜电火花加工工具电极的耐磨性
4. CENTRALIZED SUPPLY AND IMPEDANCE MONITORING FOR DUAL-DAMASCENE COPPER BATH MANAGEMENT [C] . Hung-Ming Chen, Alan Zdunek, Alejandro Barajas, International Conference on Semiconductor Technology . 2006

机译：双层镶嵌铜浴管理的集中供应和阻抗监测
5. Copper incorporation into copper zinc superoxide dismutase in normal and Menkes lymphoblasts and cloning thecDNA for a copper binding protein involved in copper metabolism [D] . Petrovic, Nenad. 1993

机译：在正常和Menkes淋巴母细胞中将铜掺入铜锌超氧化物歧化酶中，并克隆涉及铜代谢的铜结合蛋白的cDNA
6. Bioinorganic Chemistry Special Feature: Purified particulate methane monooxygenase from Methylococcus capsulatus (Bath) is a dimer with both mononuclear copper and a copper-containing cluster [O] . Raquel L. Lieberman, Deepak B. Shrestha, Peter E. Doan, 2003

机译：生物无机化学的特殊功能：来自荚膜甲基球菌（Bath）的纯化的颗粒甲烷单加氧酶是具有单核铜和含铜簇的二聚体
7. Fabrication of Copper Microparticles by Copper Deposition and Dissolution in Copper Sulfate Bath for Micropored PVD Hard Coating [O] . Ken-ichi MIURA, Tsutomu MORIKAWA, Masayuki YOKOI 2012

机译：用铜沉积和铜硫酸铜浴中的铜微粒制造微孔PVD硬涂层

Taking a New Approach to Copper ECD Bath Management

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