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Fast Easy, Functional Nanostructures

机译:快速简便的功能性纳米结构

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From system-on-a-chip to smart cards, more functions are being integrated into smaller spaces. Now "smart ink" has been developed by scientists at Sandia National Laboratories and the University of New Mexico at Albuquerque (UNM), headed by Dr. C. Jeffrey Brinker; functional nanostructures are infused into ink, making it possible to print intricate features rapidly with "soft" lithographic techniques such as inkjet printers and micro-pens. When fully realized, this relatively simple technology may be used as a mask-less technique to pattern silicon wafers with photoresist, eliminating lithographic exposures, or to directly deposit low-k dielectric material in intricate patterns.
机译:从片上系统到智能卡,更多的功能正在集成到更小的空间中。现在,由C. Jeffrey Brinker博士领导的桑迪亚国家实验室和新墨西哥大学阿尔伯克基分校(UNM)的科学家开发了“智能墨水”。功能性的纳米结构被注入到墨水中,从而可以通过“软”光刻技术(例如喷墨打印机和微型笔)快速打印出复杂的特征。当完全实现时,这种相对简单的技术可以用作无掩模技术,以用光致抗蚀剂对硅晶片进行图案化,消除光刻曝光,或以复杂的图案直接沉积低k介电材料。

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