Designing And Building 300mm Production Fabs

摘要

The process of fab design and building is one of the most important decision processes a company can encounter in its lifecycle. Adding to the complexity, most companies do not build fabs each year. Because the predictability of 300 mm tools cannot compare with that of 200 mm tools, the current wafer size transition poses serious risks to the design because of the requirement for full automation. However, a good design process can address these challenges.