Integrated Metrology: A Faustian Bargain?

摘要

Integrated metrology is like sex: Everybody feels a need for it, everyone considers himself an expert in the field, and nobody wants to pay for it. Users rightly view integrated metrology with analysis capabilities as APC enablers, but nurture vague visions of a plug-and-play world where tool hardware sockets accept any kind of integrated metrology, although standards are lacking. Hardware interfaces — how to bolt in integrated metrology — have not been defined. Most integrated metrology today results from OEM work with users and is customized, or even designed, to meet requirements.