Microelectromechanical Systems (MEMS)

摘要

Microelectromechanical systems (MEMS) range from the mundane to the spectacular. At one end of the spectrum are devices such as the precisely machined nozzles used in inkjet printers. At the other extreme, MEMS are enabling the blind to see. Like mainstream semiconductors, MEMS devices continue to diversify as new applications arise, such as tire pressure sensing. And they continue to advance, not only in terms of complexity and amount of on-board circuitry, but in terms of the design and manufacturing sophistication required to make them.