Advanced Metrology: Tackles New Materials, Process Complexity

摘要

Engineers must now consider metrology as a function of application. We no longer live in the happy world of the optical microscope or even the CD-SEM, where one tool fits almost all needs. For development and ramp, different sampling and measurement methods from those used for high volume may be needed. Beyond 45 nm, metrology will get increasingly complicated for those doing ramp work and gearing for volume production. They will increasingly require additional and more complex data — quickly.