Eco-efficient Solutions: Reduce Energy, Costs

摘要

Overall, as semiconductor fabs consider eco-efficiency solutions, there are some important points to keep in mind: 1.Fab initiatives to improve sustainability and reduce costs are very diverse. The primary objective must be clearly defined, and impact on other parameters must be clearly understood. 2.Sustainability improvements are possible by optimizing the use of resources during tool idle time, or by installing hardware such as energy-efficient chillers and integrated subfab components. In our experience, modeling the fab operations has been a key to calculating the impact beyond tool levels - to visualize and understand fully the impact on overall sustainability and costs.