New Products

摘要

The STB P300 CMP system provides improved process performance in a high-production system that has the flexibility to support high-mix, small-lot applications. The P300 is available in several configurations to best suit the needs of semiconductor, data storage, SOI, silicon and MEMS manufacturing. The system's new technologies include the nVision II optical and motor current endpoint detection system, the Saturn wafer carrier, the Precision pad conditioner, and integrated cleaning.