The IG-5C Caesium (CS) ion gun performs measurement of electronegative elements and caesium cluster analyses. It is suited to dynamic, static and imaging secondary ion mass spectroscopy (SIMS) applications particularly under UHV conditions. The intense beam of caesium ions produced from the surface ionisation source is highly focused and rngenerates a spot size adjustable to 20 urn. The ion source assembly is compact and self-aligning. Beam energy is 0.5-5.0 keV with beam currents to 150 nA.
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