Pure Ozone Generator

摘要

Ozone gas is applied widely in the environmental field; this is due to the fact that it has a much higher oxidizing ability than oxygen gas. Nevertheless, its effect is limited because its concentration is as low as a few percent. In addition, ozone is not fully capable of manifesting its advantages in those applications that are accompanied by thermal treatments, such as in the semiconductor oxidizing process. This is because of the ready tendency of ozone to be thermally decomposed. As a solution to these problems of ozone, we are introducing a high purity ozone gas that features a 99.9% or higher concentration (hereinafter referred to as "Pure Ozone") as well as a system for its generation.