New Cleaning Technologies

摘要

In the field of precision cleaning - which is essential for the production of semiconductors and precision electronic devices - a variety of new technologies are being developed to ensure higher precision and efficiency without using fluorocarbons or other harmful substances.rnTo achieve the reduction target for greenhouse gases and ozone-depleting substances, it is necessary to develop new cleaning technologies that do not affect the environment, especially in the field of high-precision processing technology for semiconductors, etc.rnIn semiconductor production processes, contaminants are eliminated before and after wafer processing. Such cleaning processes take the most important parts of semiconductor production, because the quality of semiconductors is seriously affected by contaminants such as particles, inorganic substances like metals, and organic substances like polymer compounds. Due to the higher integration of semiconductors, there has been growing demand for technologies that permit the high-precision cleaning of larger surfaces.