CONVEX CURVED CRYSTAL SPECTROGRAPH FOR SOFT X-RAY SPECTROSCOPY

摘要

A comparison between spectral instruments for soft X-ray emission measurements revealed that the most convenient device for the study of the wavelength range of interests for soft X-ray micro-litography is the convex curved crystal spectrograph (de Broglie configuration) employing a mica crystal. A ray-tracing code was developed to design the device. The spectrograph was tested by recording spectra produced by pure neon plasma focus discharges. The diffraction efficiency of the crystal was calculated in order to compute the response function of the spectrograph.