Scanning-free grazing emission x-ray fluorescence by means of an angular dispersive arrangement with a two-dimensional position-sensitive area detector

摘要

We report on the application of a two-dimensional position-sensitive area detector towards grazing emission x-ray fluorescence (GEXRF) spectroscopy. GEXRF allows for surface-sensitive studies with nanometer-scale accuracy in the depth direction by measuring the intensity variation of an x-ray fluorescence line with the grazing emission angle. The presented experimental setup is based on a fixed sample-detector arrangement and does not require any moving components. We show that the dispersion of the grazing emission angle along a position-sensitive detector allows to acquire with an excellent angular resolution a full GEXRF profile in a single measurement. Moreover, the use of a two-dimensional detector allows to perform experiments with an increased solid angle of detection per emission angle. This results in combination with the nonsequential and simultaneous acquisition of the GEXRF profiles of different emission lines in considerably reduced acquisition times. The realization, the demands, and the main characteristics of the scanning-free GEXRF setup will be presented. A few experimental examples will serve to illustrate the analytical possibilities offered by the presented setup.