机译:电子回旋共振离子源 a sup>上的感应加热高温熔点材料的纯蒸气源
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan;
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan;
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan;
National Institute of Radiological Science (NRIS), 4-9-1 Anagawa, Inage, Chiba 263-8555, Japan;
National Institute of Radiological Science (NRIS), 4-9-1 Anagawa, Inage, Chiba 263-8555, Japan;
Bio-Nano Electronics Research Centre, Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585, Japan;
Bio-Nano Electronics Research Centre, Toyo University, 2100 Kujirai, Kawagoe, Saitama 350-8585, Japan;
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan;
Division of Electrical, Electronic and Information Engineering, Graduate School of Engineering, Osaka University, 2-1 Yamada-oka, Suita-shi, Osaka 565-0871, Japan;
cyclotron resonance; eddy currents; induction heating; ion sources; melting point; plasma radiofrequency heating;
机译:通过两频加热抑制电子回旋共振离子源中的回旋不稳定性
机译:用宽带微波辐射进行电子加热:一种改善常规B最小电子回旋共振离子源性能的新方法
机译:基于蒸气中电子回旋共振放电的钙等离子体源中等离子体的电子温度
机译:通过感应加热蒸发器的纯材料蒸气源用于电子回旋谐振离子源
机译:用于电子材料蚀刻的高密度电子回旋共振和感应耦合等离子体源的比较:电子材料的新等离子体蚀刻方案。
机译:电子回旋共振离子源增强离子注入钛的理化和生物学特性
机译:基于具有强大毫米波等离子体加热的高电流电子回火离子源的点状中子源