Protective coating to enhance the chemical resistance of carbon-based radiation or particle windows

摘要

This research disclosure relates to the protective coating for carbon-based membranes to enhance their chemical resistance for the applications as radiation or particle windows. Thin membranes made of carbon or carbon-based materials, e.g. graphene, diamond, diamond-like carbon (DLC), pyrolytic carbon or graphite, are known to be highly transparent to certain radiation or particles which can be of scientific or technological importance, and thus can advantageously be used as window materials for detectors or sources for radiation or particles. For example, thin carbon-based membranes with typical thicknesses ranging from 50 nm to 2000 nm can be used as X-ray windows for X-ray detectors including silicon drift detectors (SDD), PIN diodes, Si(Li) detectors, CdTe-detectors and proportional counters, or for X-ray sources as X-ray tubes or sources consisting of e.g. the radioactive iron isotope ~(55)Fe.