MULTILAYER SUPERCONDUCTIVE ARTICLE. SUPERCONDUCTIVE COIL, ACTUATOR, MOTOR, STAGE APPARATUS AND LITHOGRAPHIC APPARATUS

摘要

The invention provides a multilayer superconductive article extending in a longitudinal direction, the article comprising: 1. a substrate layer extending in the longitudinal direction; 2. a superconductive layer extending in the longitudinal direction; 3. a further layer extending in the longitudinal direction; wherein the subsirate layer or the further layer comprises one or more cooling tabs extending in the longitudinal direction and in a transverse direction.