ENHANCED THERMAL CONDUCTIVITY IN VACUUM

摘要

A jointed component for a lithographic apparatus comprising a joint between two or more mating surfaces, at least one of the mating surfaces comprising tin. A jointed component for a lithographic apparatus comprises a joint between two or more components formed of a material other than tin, the two components joined at respective mating surfaces, at least one of the mating surfaces comprising tin thereon. Also described is a lithographic apparatus comprising a jointed component comprising a tin layer, the use of tin as a thermally conductive interface materiell in a lithographic apparatus, and a method of enhancing the thermal conductivity of a jointed connection of a lithographic apparatus.