A jointed component for a lithographic apparatus comprising a joint (16) between two or more mating surfaces (17a, 19a), at least one of the mating surfaces comprising tin (18). A jointed component for a lithographic apparatus comprises a joint between two or more components (17, 19) formed of a material other than tin, the two components joined at respective mating surfaces, at least one of the mating surfaces comprising tin thereon. Also described is a lithographic apparatus comprising a jointed component comprising a tin layer, the use of tin as a thermally conductive interface material in a lithographic apparatus, and a method of enhancing the thermal conductivity of a jointed connection of a lithographic apparatus.
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