REVERSIBLE ELONGATE ELEMENT FOR ALIGNING AND JOINING COMPONENTS

摘要

The present invention relates to a reversible elongate clement for installation of an inspection or metrology apparatus on a vessel and associated assembly, apparatus, system and method. A lithographic apparatus is a machine constructed to apply a desired pattern onto a substrate. A lithographic apparatus can be used, for example, in the manufacture of integrated circuits (ICs). A lithographic apparatus may for example project a pattern from a patterning device (e.g. a mask) onto a layer of radiation-sensitive material (resist) provided on a substrate.