Preparation of titanium oxide electrochromic thin films by reactive DC magnetron sputtering and their characterization

摘要

TiO_2 electrochromic thin films have been prepared by reactive DC magnetron sputtering with various conditions and their electrochromic properties have been investigated by using 1m LiClO_4 in propylene carbonate as an electrolyte. Total ressure was found to be the most important parameter to controll the electrochromic properties of sputtered TiO_@ films.